Fully Integrated MEMS Micropump and Miniaturized Mass Flow Sensor as Basic Components for a Microdosing System.
Micromachines November 21, 2024 Martin Seidl, Gabriele Schrag
A new micropump and mass flow sensor design, each smaller than 2 mm per side, can be integrated into a single microfluidic platform for applications such as microdosing. The pump uses electrostatic actuation and active valves, measures 1.86 mm × 1.86 mm × 0.3 mm, and pumps gas at up to 110 μL/min perpendicular to the chip surface. The flow sensor, 1.4 mm × 1.4 mm × 0.4 mm, uses hot-wire anemometry with wires inside a through-hole, enabling direct integration with the pump. First prototypes detect flows around 10 μL/min and measure up to 20 mL/min without dedicated electronics.